MOCVD Toxic Gas Monitor |
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Light Status: Green
Monitor Online/Status Normal
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| Parameter | Value |
|---|---|
| Alarm Level 1; Gas Cabinet | 5 |
| Alarm Level 1; Reactor Cabinet | 5 |
| Alarm Level 1; Scrubber Outlet | 5 |
| Alarm Level 1; System Enclosure | 5 |
| Alarm Level 1; Room | 5 |
| Alarm Level 1; Pump Cabinet | 5 |
| Alarm Level 1; Disabled | 5 |
| Alarm Level 1; Disabled | 5 |
| Alarm Level 2; Gas Cabinet | 50 |
| Alarm Level 2; Reactor Cabinet | 50 |
| Alarm Level 2; Scrubber Outlet | 50 |
| Alarm Level 2; System Enclosure | 50 |
| Alarm Level 2; Room | 10 |
| Alarm Level 2; Pump Cabinet | 50 |
| Alarm Level 2; Disabled | 10 |
| Alarm Level 2; Disabled | 10 |
| Parameter | Value |
|---|---|
| Alarm 1; Gas Cabinet | Off |
| Alarm 1; Reactor Cabinet | Off |
| Alarm 1; Scrubber Outlet | Off |
| Alarm 1; System Enclosure | Off |
| Alarm 1; Room | Off |
| Alarm 1; Pump Cabinet | Off |
| Alarm 1; Disabled | Off |
| Alarm 1; Disabled | Off |
| Alarm 2; Gas Cabinet | Off |
| Alarm 2; Reactor Cabinet | Off |
| Alarm 2; Scrubber Outlet | Off |
| Alarm 2; System Enclosure | Off |
| Alarm 2; Room | Off |
| Alarm 2; Pump Cabinet | Off |
| Alarm 2; Disabled | Off |
| Alarm 2; Disabled | Off |
| Flow Fault; Gas Cabinet | Off |
| Flow Fault; Reactor Cabinet | Off |
| Flow Fault; Scrubber Outlet | Off |
| Flow Fault; System Enclosure | Off |
| Flow Fault; Room | Off |
| Flow Fault; Pump Cabinet | Off |
| Flow Fault; Disabled | Off |
| Flow Fault; Disabled | Off |
| Concentration; Gas Cabinet | 0.0 |
| Concentration; Reactor Cabinet | 0.0 |
| Concentration; Scrubber Outlet | 0.0 |
| Concentration; System Enclosure | 0.0 |
| Concentration; Room | 0.0 |
| Concentration; Pump Cabinet | 0.0 |
| Concentration; Disabled | 0.0 |
| Concentration; Disabled | 0.0 |
| Parameter | Value |
|---|---|
| Date | 9/29/20 |
| Time | 7:07 |
| Heartbeat seconds | 5 |
| Tape days remaining | 32 |
| Watchdog | On |
| Analyzing | On |
| Audible | Off |
| Light Blue | Off |
| CfValid | On |
| Critical Fault | Off |
| Gas Level 1 | Off |
| Gas Level 2 | Off |
| General Fault | Off |
| Light Green | On |
| Light Orange | Off |
| Power | On |
| Light Red | Off |
| Enabled; Point 1 (Gas Cabinet) | On |
| Enabled; Point 2 (Reactor Cabinet) | On |
| Enabled; Point 3 (Scrubber Outlet) | On |
| Enabled; Point 4 (System Enclosure) | On |
| Enabled; Point 5 (Room) | On |
| Enabled; Point 6 (Pump Cabinet) | On |
| Enabled; Point 7 | Off |
| Enabled; Point 8 | Off |
| Serial Number | 83001 |
| Watchdog Seconds | 0 |
| Gas Type; Gas Cabinet | 319 |
| Gas Type; Reactor Cabinet | 319 |
| Gas Type; Scrubber Outlet | 319 |
| Gas Type; System Enclosure | 319 |
| Gas Type; Room | 319 |
| Gas Type; Pump Cabinet | 319 |
| Gas Type; Disabled | 319 |
| Gas Type; Disabled | 319 |