MOCVD Toxic Gas Monitor |
|
Monitor Online/Status Normal
|
|
||||||||||||||||||||||||||||||||
|
|
||||||||||||||||||||||||||||||||
|
|
||||||||||||||||||||||||||||||||
|
|
Parameter | Value |
---|---|
Alarm Level 1; Gas Cabinet | 5 |
Alarm Level 1; Reactor Cabinet | 5 |
Alarm Level 1; Scrubber Outlet | 5 |
Alarm Level 1; System Enclosure | 5 |
Alarm Level 1; Room | 5 |
Alarm Level 1; Pump Cabinet | 5 |
Alarm Level 1; Disabled | 5 |
Alarm Level 1; Disabled | 5 |
Alarm Level 2; Gas Cabinet | 50 |
Alarm Level 2; Reactor Cabinet | 50 |
Alarm Level 2; Scrubber Outlet | 50 |
Alarm Level 2; System Enclosure | 50 |
Alarm Level 2; Room | 10 |
Alarm Level 2; Pump Cabinet | 50 |
Alarm Level 2; Disabled | 10 |
Alarm Level 2; Disabled | 10 |
Parameter | Value |
---|---|
Alarm 1; Gas Cabinet | Off |
Alarm 1; Reactor Cabinet | Off |
Alarm 1; Scrubber Outlet | Off |
Alarm 1; System Enclosure | Off |
Alarm 1; Room | Off |
Alarm 1; Pump Cabinet | Off |
Alarm 1; Disabled | Off |
Alarm 1; Disabled | Off |
Alarm 2; Gas Cabinet | Off |
Alarm 2; Reactor Cabinet | Off |
Alarm 2; Scrubber Outlet | Off |
Alarm 2; System Enclosure | Off |
Alarm 2; Room | Off |
Alarm 2; Pump Cabinet | Off |
Alarm 2; Disabled | Off |
Alarm 2; Disabled | Off |
Flow Fault; Gas Cabinet | Off |
Concentration; Gas Cabinet | 0.0 |
Flow Fault; Reactor Cabinet | Off |
Concentration; Reactor Cabinet | 0.0 |
Flow Fault; Scrubber Outlet | Off |
Concentration; Scrubber Outlet | 0.0 |
Flow Fault; System Enclosure | Off |
Concentration; System Enclosure | 0.0 |
Flow Fault; Room | Off |
Concentration; Room | 0.0 |
Flow Fault; Pump Cabinet | Off |
Concentration; Pump Cabinet | 0.0 |
Flow Fault; Disabled | Off |
Concentration; Disabled | 0.0 |
Flow Fault; Disabled | Off |
Concentration; Disabled | 0.0 |
Parameter | Value |
---|---|
Date | 2/27/21 |
Time | 5:48 |
Heartbeat seconds | 5 |
Tape days remaining | 87 |
Watchdog | Off |
Analyzing | On |
Audible | Off |
Light Blue | Off |
CfValid | On |
Critical Fault | Off |
Gas Level 1 | Off |
Gas Level 2 | Off |
General Fault | Off |
Light Green | On |
Light Orange | Off |
Power | On |
Light Red | Off |
Enabled; Point 1 (Gas Cabinet) | On |
Enabled; Point 2 (Reactor Cabinet) | On |
Enabled; Point 3 (Scrubber Outlet) | On |
Enabled; Point 4 (System Enclosure) | On |
Enabled; Point 5 (Room) | On |
Enabled; Point 6 (Pump Cabinet) | On |
Enabled; Point 7 | Off |
Enabled; Point 8 | Off |
Serial Number | 83001 |
Watchdog Seconds | 0 |
Gas Type; Gas Cabinet | 319 |
Gas Type; Reactor Cabinet | 319 |
Gas Type; Scrubber Outlet | 319 |
Gas Type; System Enclosure | 319 |
Gas Type; Room | 319 |
Gas Type; Pump Cabinet | 319 |
Gas Type; Disabled | 319 |
Gas Type; Disabled | 319 |