MOCVD Toxic Gas Monitor

Light Status: Green

Monitor Online/Status Normal

1 Gas Cabinet
0.0
Status: Normal AsH3 (0-50 PPB)
5 Room
0.0
Status: Normal AsH3 (0-50 PPB)
2 Reactor Cabinet
0.0
Status: Normal AsH3 (0-50 PPB)
6 Pump Cabinet
0.0
Status: Normal AsH3 (0-50 PPB)
3 Scrubber Outlet
0.0
Status: Normal AsH3 (0-50 PPB)
7 Disabled
4 System Enclosure
0.0
Status: Normal AsH3 (0-50 PPB)
8 Disabled
Parameter Value
Alarm Level 1; Gas Cabinet5
Alarm Level 1; Reactor Cabinet5
Alarm Level 1; Scrubber Outlet5
Alarm Level 1; System Enclosure5
Alarm Level 1; Room5
Alarm Level 1; Pump Cabinet5
Alarm Level 1; Disabled5
Alarm Level 1; Disabled5
Alarm Level 2; Gas Cabinet50
Alarm Level 2; Reactor Cabinet50
Alarm Level 2; Scrubber Outlet50
Alarm Level 2; System Enclosure50
Alarm Level 2; Room10
Alarm Level 2; Pump Cabinet50
Alarm Level 2; Disabled10
Alarm Level 2; Disabled10
Parameter Value
Alarm 1; Gas CabinetOff
Alarm 1; Reactor CabinetOff
Alarm 1; Scrubber OutletOff
Alarm 1; System EnclosureOff
Alarm 1; RoomOff
Alarm 1; Pump CabinetOff
Alarm 1; DisabledOff
Alarm 1; DisabledOff
Alarm 2; Gas CabinetOff
Alarm 2; Reactor CabinetOff
Alarm 2; Scrubber OutletOff
Alarm 2; System EnclosureOff
Alarm 2; RoomOff
Alarm 2; Pump CabinetOff
Alarm 2; DisabledOff
Alarm 2; DisabledOff
Flow Fault; Gas CabinetOff
Flow Fault; Reactor CabinetOff
Flow Fault; Scrubber OutletOff
Flow Fault; System EnclosureOff
Flow Fault; RoomOff
Flow Fault; Pump CabinetOff
Flow Fault; DisabledOff
Flow Fault; DisabledOff
Concentration; Gas Cabinet0.0
Concentration; Reactor Cabinet0.0
Concentration; Scrubber Outlet0.0
Concentration; System Enclosure0.0
Concentration; Room0.0
Concentration; Pump Cabinet0.0
Concentration; Disabled0.0
Concentration; Disabled0.0
Parameter Value
Date9/19/17
Time11:42
Heartbeat seconds5
Tape days remaining106
WatchdogOn
AnalyzingOn
AudibleOff
Light BlueOff
CfValidOn
Critical FaultOff
Gas Level 1Off
Gas Level 2Off
General FaultOff
Light GreenOn
Light OrangeOff
PowerOn
Light RedOff
Enabled; Point 1 (Gas Cabinet)On
Enabled; Point 2 (Reactor Cabinet)On
Enabled; Point 3 (Scrubber Outlet)On
Enabled; Point 4 (System Enclosure)On
Enabled; Point 5 (Room)On
Enabled; Point 6 (Pump Cabinet)On
Enabled; Point 7 Off
Enabled; Point 8 Off
Serial Number 83001
Watchdog Seconds0
Gas Type; Gas Cabinet 319
Gas Type; Reactor Cabinet 319
Gas Type; Scrubber Outlet 319
Gas Type; System Enclosure 319
Gas Type; Room 319
Gas Type; Pump Cabinet 319
Gas Type; Disabled 319
Gas Type; Disabled 319

Gas Concentrations (PPB)

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Test plot file